MEMS, Microfluidics and Microsystems Executive Review

Microfabricated diamond probes for atomic force microscopes

We recently spoke with Dr. Nicolaie “Mike” Moldovan, MEMS Lead Scientist at Advanced Diamond Technologies, about the company's microfabricated AFM diamond probes. These probes are based on discoveries at Argonne National Laboratory that resulted in a new form of diamond film called ultrananocrystalline diamond produced by chemical vapor deposition.

According to Dr. Moldovan, the company's process results in probes far superior in performance to those fabricated from silicon nitride, and at a price that is much more affordable than traditional diamond AFM probes with individually mounted and sharpened tips that can be priced as high as hundreds or thousands of dollars.

The annual market for AFM probes is estimated to be $50 million and the growth rate is healthy due to the proliferation of AFMs in biology, chemistry, mechanics and physics research labs as well as in industries such as semiconductor chip manufacturing. 

SUSS probe systems installed in IMEC's research facilities

(Press Release) -- SUSS MicroTec AG, a leading manufacturer of probe systems used to characterize semiconductor devices at wafer level, has installed the latest 300 mm technology in wafer probe systems at the nanoelectronics research center IMEC in Leuven, Belgium.  Both PA300PS ProbeShield® semiautomatic probe systems with ReAlign™ and ContactView™ technology and PA300 probe systems for RF-noise and S-parameter measurements have been installed.  An agreement has been made for further collaboration on enhancing 300 mm probe systems in the following years.